The following article presents two approaches for the observation and control of assembly processes for hybrid micro systems. To meet the demands of a production of huge quantities of pieces, the control of the assembly of a micro mixing by image processing is presented. Finally a flexible fiber based sensor for handling devices is presented.

No abstract

The automation of micro assembly is becoming more and more important in micro technology. Especially the demands on handling and process observation of hybrid micro systems with optical and mechanical functions are quite high. Because of this process monitoring is inevitably necessary for a better understanding of what is really happening in the micro world. Process visualisation is very important in (micro electronic and mechanical systems) MEMS but does not guarantee an operative micro system. Therefore, instruments for quality control are required to secure a safe and reproducible assembly. The aim of this article is to give an overview over so far used and new devices for process observation and quality control.

The article will give some new impulses and ®rst results on the way to a new assembly process of a miniature¯exible ®bre-scope. New techniques enable the automatic placement of an aspherical lens in front of a ®bre-scope depending on the desired working distance.

Der vorliegende Artikel stellt aus dem Gebiet der prozessintermittierenden Qualitätskontrolle Aspekte aus dem Bereich der Form- und Lageerkennung von Mikrobauteilen mittels faseroptischer Streifenprojektion und eine Anwendung von bildverarbeitungsgestützter Prozessüberwachung vor. Zur Thematik der klassischen Postprozessmesstechnik wird im Kontext der konfokalen Laserscanningmikroskopie eine Möglichkeit zur Erhöhung der Flexibilität des Messverfahrens auf Basis angepasster Signalauswertung dargestellt.