PZT(70/30) powder was prepared by a sol-gel method and PZT thick films were fabricated by the screen-printing method on the alumina substrates. The coating and drying procedure was repeated 4 times. And then the PZT(30/70) precusor solution was spin-coated on the PZT thick films. A concentration of a coating solution was 0.5 mol/L and the number of coating was varied from 0 to 6. The porosity decreased and the grain size increased with increasing the number of coatings. The thickness of the PZT-6(6: number of coatings) films was about 60~65μm. All PZT thick films showed the typical XRD patterns of a typical perovskite polycrystalline structure. The relative dielectric constant of the PZT-6 thick film was 540. The remanent polarization and coercive field of the PZT-6 film were 23.6 μC /cm2, 12.0 kV/cm, respectively.
Ferroelectric Pb(Zr0.6Ti0.4)O3 (PZT(60/40)) powder was prepared by a sol-gel method and PZT thick films were fabricated by the screen-printing method on the alumina substrates. The Pt bottom electrodes were screen-printed on the alumina substrate. The PZT(60/40) thick films were annealed at 1050°C for 10min in PbO atmosphere. Pb(Zr0.4Ti0.6)O3 (PZT(40/60)) precursor solution, which prepared by sol-gel method, was spin-coated on the PZT thick films to obtain a densification. These PZT multilayered thick films were annealed at 650°C for 2 h in PbO atmosphere. The upper electrodes were fabricated by screen printing the Ag paste and then firing at 590°C for 10min. Its structural and electrical properties of the PZT thick films with the treatment of PZT(40/60) precursor solution coating were investigated. The coating and drying procedure was repeated 4 times. And then the PZT(40/60) precursor solution was spin-coated on the multilayered thick films. A concentration of a coating solution was 1.5 mol/L and the number of coating was repeated from 0~15. The porosity of the thick films was decreased with increasing the number of coatings. All PZT multilayered thick films showed the XRD patterns of typical peroveskite polycrystalline structure. The relative dielectric constant of the PZT-15 (15: number of solution coatings) thick film were 370. And the PZT-15 thick film shows the remanent polarization of 23.5 μC/cm2 and coercive field of 18.0 kV/cm, respectively.
Ferroelectric PZT(70/30) thick films were fabricated by the hybrid technique adding the sol coating process to the screen-printing process to obtain a good densification. Structural and electrical properties of the thick films with the sol concentration were investigated. The relative dielectric constant increased and dielectric loss decreased with increasing the sol concentration, the values of the thick film coated with sol concentration of 1.5 M were 698 and 2.5 % at 1 kHz, respectively. And the remanent polarization and dielectric breakdown strength of the thick film coated with sol concentration of 1.5 M were about 38 μC/cm2 and 200 kV/cm, respectively. The leakage current densities were less than 10-8 A/cm2 at the applied electric field range of 0-100 kV/cm in all thick films.
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