Abstract. We theoretically investigate a high sensitive photonic crystal integrated biosensor array structure which is potentially used for label-free multiplexed sensing. The proposed device consists of an array of three sandwiched H0 cavities patterned above silicon on insulator (SOI) substrate; each cavity has been designed for different cavity spacing and different resonant wavelength. Results obtained by performing finite-difference time-domain (FDTD) simulations, indicate that the response of each detection unit shifts independently in terms of refractive index variations. The optimized design makes possible the combination of sensing as a function of location, as well as a function of time in the same platform. A refractive index sensitivity of 520nm/RIU and a quality factor over 10 4 are both achieved with an accompanied crosstalk of less than -26 dB. In addition, the device presents an improved detection limit (DL) of 1.24.10 -6 RIU and a wide measurement range. These features make the designed device a promising element for performing label-free multiplexed detection in monolithic substrate for medical diagnostics and environmental monitoring.
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