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The effect of non-Fourier boundary condition on the 3-omega method for measuring the thermal conductivity of microscale thin films using the hyperbolic heat conduction equation and the Fourier equation is examined. Non-Fourier boundary condition with the Fourier equation leads to 80% error in the temperature oscillations and increases the error to 85% in the case of non-Fourier boundary condition with the hyperbolic heat conduction equation. The solution of the non-Fourier boundary condition with the hyperbolic heat conduction equation gives the most accurate thermal conductivity expression. The analysis also provides a method for determining the relaxation time of thin films.

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