A multistep procedure for creating nanohole‐patterned gold films (see Figure) is presented. The steps include the self‐assembly of metal‐loaded polystyrene‐block‐poly(2‐vinylpyridine) micelles on GaAs substrates, hydrogen gas plasma treatment, directional reactive ion etching, and gold sputtering. The size and separation of holes resemble that of the gold cluster pattern.
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We describe a technique to create very small semiconductor nanostructures, with sizes far beyond the limit of conventional optical lithography processes, by the use self-assembling diblock copolymers as nanolithographic masks. Quantum structures with very high aspect ratio of 1:10 were fabricated by dry etching. In a first step, so-called diblock copolymer micelles were generated in a toluene solution. These micelles were loaded by a noble-metal salt. After dipping a substrate into this solution, a monolayer of ordered micelles is generated, covering almost the complete surface. After treatment in a hydrogen plasma all of the organic components are removed and only crystalline metal clusters of ≈12 nm size remain. This metal cluster mask can be used directly in a chlorine dry etching process to etch cylinders in GaAs and its alloys of In and Al. It is also possible to etch through a quantum well layer underneath the surface in order to produce quantum dots. The resulting nanostructures were investigated by scanning force microscopy, by high resolution transmission electron microscopy, and also by low temperature photoluminescence spectroscopy
Under pulsed operation, time dependent spectral and electro-optical measurements on GaN-based laser diodes show a considerable red shift in the emission wavelength and a decreasing voltage drop across the device. These changes appear on a rather short time scale in the microsecond range. During a 3.7 microsecond long pulse, a temperature increase of approximately 50 K is obtained using different experimental methods. This value agrees well with numerical simulations based on the thermal properties of the material.
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