The Scienta ESCA300 is a state-of-the-art x-ray photoelectron spectrometer with high intensity, and high energy and spatial resolution. This unique combination of features is made possible by the use of a high-power rotating anode x-ray source with monochromatization, high transmission and imaging electron optics and a multichannel detector. The first ESCA300 has been installed recently at ICI Wilton. We report on the performance of this instrument for conducting samples and as a microanalytical device. Also described are its performance for insulating samples (polymer films) and studies of charge compensation using the Bremsstrahlung-induced electrons from an unmonochromated dual anode x-ray source.

In the present interlaboratory comparison, the consistency and validity of the Shirley, straight-line and Tougaard methods for determination of peak intensities from measured XPS spectra have been studied by analysis of data on Au and Ni taken at eight laboratories. The reproducibility of the individual measuring systems was determined to be 26%. The RMS scatter around their mean values of the ratio of the peak intensity to the Au 4d peak intensity was 6% for the Tougaard method, 9-10% for the Shirley method and 8-9% for the straight-line method. The increase in root mean square (RMS) scatter of data due to data being recorded in different laboratories amounts to 3-4%, independent of the method applied for background correction. The RMS deviation from theory of intensity ratios of peaks from Ni and Au to the Au 4d peak intensity is 14% for the Tougaard method, 33% for the Shirley method and 31% for the straight-line method. The absolute accuracy of the methods cannot be established to better than the accuracy on the theoretical peak intensity ratios and the uncertainty in the energy dependence of the analyser response function. It is, however, reasonable to expect the combined uncertainty of these factors to be at least 10-15%. The peak intensity ratios obtained with the Tougaard method then falls within the expected accuracy of the theoretical ratios. INTRODUCTIONThe present intercomparison work follows a previous extensive study' of the validity and consistency of methods for determination of XPS peak intensities. The notation and procedures for data analysis used in the present work are the same as in Ref. 1 and will only be summarized briefly here.Quantitative surface composition analysis by XPS relies on peak intensities. Peak areas are used as a measure of the peak intensity. Procedures to determine the peak area from a measured spectrum is complicated by the inelastic scattering events that the photoelectrons undergo as they leave the solid. This gives rise to an inelastic background intensity, which is subtracted to define the peak areas. Several methods have been used to define this background. Among these, the Shirley and the straight-line methods are most widely used. these methods, uncertainty arises from the problem of defining suitable start and end points for the evaluation of the background signal. More recently, a method that relies on a detailed description of the physical processes involved was proposed by T~ugaard.~.' This method has been applied by several groups, who have named the procedure the Tougaard method. To be consistent with this convention, we shall use here the same name for this background correction method. The complexity of the method is similar to that of the Shirley method. Because of shake-up processes, the XPS peak intensity extends over an energy range of 50-200 eV.5 To account for these shake-up processes, which vary with the sample composition, it is necessary to measure spectra over at least this energy range. For inhomogeneous samples, analysis of wide-scan spectra als...