We report uncertainties in X-ray photoelectron spectroscopy (XPS) intensities arising from commonly used methods and procedures for subtraction of the spectral background. These uncertainties were determined from a comparison of XPS intensities reported by volunteer analysts from 28 institutions and the corresponding intensities expected for a set of simulated XPS spectra. We analyzed peak intensities from 32 sets of data for a group of 12 spectra that had been simulated for a monochromated Al Kα source. Each reported intensity was compared with an expected intensity for the particular integration limits chosen by each analyst and known from the simulation design. We present ratios of the reported intensities to the expected intensities for the background-subtraction methods chosen by the analysts. These ratios were close to unity in most cases, as expected, but deviations were found in the results from some analysts, particularly if the main peak was asymmetrical or if shakeup was present. We showed that better results for the Shirley, Tougaard, and linear backgrounds were obtained when analysts determined peak intensities over certain energy ranges or integration limits. We then were able to recommend integration limits that should be a useful guide in the determination of peak intensities for other XPS spectra. The use of relatively narrow integration limits with the Shirley and linear backgrounds, however, will lead to measures of peak intensities that are less than the total intensities. Although these measures may be satisfactory for some quantitative analyses, errors in quantitative XPS analyses can occur if there are changes in XPS lineshapes or shakeup fractions with change of chemical state. The use of curve-fitting equations to fit an entire spectrum will generally exclude the shakeup contribution to the intensity of the main peak, and no account will be taken of any variation in the shakeup fraction with change of chemical state.
IntroductionMeasurement of peak intensities in X-ray photoelectron spectroscopy (XPS) data is complicated by the need to subtract a background from the measured spectra. This background is due principally to electrons scattered inelastically in the specimen and, for XPS measurements made with a nonmonochromated X-ray source, to photoelectrons excited by bremsstrahlung and X-ray satellites. The peak intensities may be used directly for quantitative surface analyses [1] or a region of the spectrum, containing the peak of interest and the intensity distribution at lower energies, may be analyzed to obtain composition-depth information. [2] Three methods have been commonly used for background subtraction. First, a linear background may be chosen between two arbitrarily selected end data points (or regions of a spectrum) on either side of the peak of interest. Second, a background function suggested by Shirley [3] can be used to describe approximately the shape of the distribution due to inelastically scattered electrons from the peak of interest; this background is also applied ...