2009
DOI: 10.1002/sia.2995
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Evaluation of uncertainties in X‐ray photoelectron spectroscopy intensities associated with different methods and procedures for background subtraction. I. Spectra for monochromatic Al X‐ray

Abstract: We report uncertainties in X-ray photoelectron spectroscopy (XPS) intensities arising from commonly used methods and procedures for subtraction of the spectral background. These uncertainties were determined from a comparison of XPS intensities reported by volunteer analysts from 28 institutions and the corresponding intensities expected for a set of simulated XPS spectra. We analyzed peak intensities from 32 sets of data for a group of 12 spectra that had been simulated for a monochromated Al Kα source. Each … Show more

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Cited by 15 publications
(25 citation statements)
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(20 reference statements)
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“…These plots are shown in Figs We have chosen to analyze the plots of the R values in Figs A15-A26 and B15-B26 as we did for the corresponding plots for the monochromatic Al-Kα spectra. [3] We expect that these values should, ideally, be close to unity. We do not expect, however, that the ratios should be exactly unity because the background function used by the analysts (Shirley, Tougaard, or other) will differ to varying extents from the actual inelastic background in each of our simulated spectra.…”
Section: Comparisons Of Reported and Expected Intensitiesmentioning
confidence: 95%
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“…These plots are shown in Figs We have chosen to analyze the plots of the R values in Figs A15-A26 and B15-B26 as we did for the corresponding plots for the monochromatic Al-Kα spectra. [3] We expect that these values should, ideally, be close to unity. We do not expect, however, that the ratios should be exactly unity because the background function used by the analysts (Shirley, Tougaard, or other) will differ to varying extents from the actual inelastic background in each of our simulated spectra.…”
Section: Comparisons Of Reported and Expected Intensitiesmentioning
confidence: 95%
“…Since most of the methodology has already been described in paper I, [3] we will present here only a summary of the most important results and conclusions. Details of our results together with many figures are given in the Supporting Information.…”
Section: Evaluation Of Uncertainties In Xps Peak Intensitiesmentioning
confidence: 97%
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“…These tests did show total ZrO 2 layer growth similar to the predicted growth, further proving normal oxidation behavior for resistive heating and double oxidation. Curve fitting was done using the Gaussian-Lorentzian peak and a Shirley background algorithm of the PHI data massaging program MultiPak 68,69 . Depth profiling was performed using Ar sputtering at 3kV energy on a non-spinning specimen.…”
Section: Double Oxidationmentioning
confidence: 99%