This paper reports on the fabrication, simulation, and charge collection characteristics of a new generation of cylindrical silicon microdosimeters fabricated on SOI wafers. The devices consist of an array of p + electrodes surrounded by trench n + electrodes creating well defined, cylindrical sensitive volumes. A first batch of microsensors with 5.4 µm active thickness has been successfully fabricated. The devices are fully functional with good diode behavior and a depletion voltage of only 3 V. Their charge collection characteristics have been investigated using the IBIC technique with protons and alpha particles. The IBIC maps show a 100% yield of active cells in a microdosimeter array and full charge collection efficiency in the active area of the unit microsensors. These devices constitute an step forward in the current status of microdosimeters based on silicon technologies.
In this work, we propose a solid-state-detector for use in radiation microdosimetry. This device improves the performance of existing dosimeters using customized 3D-cylindrical microstructures etched inside silicon. The microdosimeter consists of an array of micro-sensors that have 3Dcylindrical electrodes of 15 lm diameter and a depth of 5 lm within a silicon membrane, resulting in a well-defined micrometric radiation sensitive volume. These microdetectors have been characterized using an 241 Am source to assess their performance as radiation detectors in a high-LET environment. This letter demonstrates the capability of this microdetector to be used to measure dose and LET in hadrontherapy centers for treatment plan verification as part of their patient-specific quality control program. V
The commissioning of an ion beam for hadrontherapy requires the evaluation of the biologically weighted effective dose that results from the microdosimetric properties of the therapy beam. The spectra of the energy imparted at cellular and sub-cellular scales are fundamental to the determination of the biological effect of the beam. These magnitudes are related to the microdosimetric distributions of the ion beam at different points along the beam path. This work is dedicated to the measurement of microdosimetric spectra at several depths in the central axis of a (12)C beam with an energy of 94.98 AMeV using a novel 3D ultrathin silicon diode detector. Data is compared with Monte Carlo calculations providing an excellent agreement (deviations are less than 2% for the most probable lineal energy value) up to the Bragg peak. The results show the feasibility to determine with high precision the lineal energy transfer spectrum of a hadrontherapy beam with these silicon devices.
scite is a Brooklyn-based organization that helps researchers better discover and understand research articles through Smart Citations–citations that display the context of the citation and describe whether the article provides supporting or contrasting evidence. scite is used by students and researchers from around the world and is funded in part by the National Science Foundation and the National Institute on Drug Abuse of the National Institutes of Health.