The objects of investigation are porous nanostructured SiO 2 -SnO 2 sol-gel films used as sensitive elements on vacuum sensors. The properties of the films with spherical, labyrinth, and percolation mesh structures are analyzed. It is shown that the resistance of sensitive elements based on these films sharply drops at a pressure below the atmospheric value. Processes taking place in the films at subatmospheric pressures are studied. It is found that the desorption of water vapor increases the resistance of the sensitive elements of vac uum sensors, whereas the desorption of carbon dioxide and oxygen decreases the resistance. This agrees with experimental data.
The possibility of using a nanocomposite based on zinc oxide ultrafine powder and polyvinyl alcohol as a sensitive element of a gas sensor is analyzed. It is shown that zinc oxide nanoparticles with a shape close to a rectangular parallelepiped can be considered as potential wells, separated by layers of polyvinyl alcohol that form potential barriers. The contribution of the tunneling component to nanocomposite current density is estimated for systems with and without oxygen chemisorptions. Results of numerical simulation are shown that a shift of the peaks in the dependence of transmittance on electron energy and a decrease of the tunneling current density are going with an increase in the concentration of oxygen atoms. Perspectives of the use of quantum-dimensional effects in the development of new generation gas sensors, which are based on conductivity modulation during sensor interaction with analyte gases, are demonstrated
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