Correlations in infrared spectra of nanostructures based on mixed oxides

Averin, I. A.; Карманов, А. А.; Мошников, В. А.; Пронин, И. А.; Igoshina, S. E.; Сигаев, Александр Петрович; Terukov, E. I.

doi:10.1134/s1063783415120069

Cited by 26 publications

(3 citation statements)

References 17 publications

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“…These are, first of all, the bonds Si−H [31] (a weak peak at 670 cm −1 ) and N−H [26] (1150 cm −1 ). We should also note the presence of weak peaks at positions 1275 and 2970 cm −1 , which can be associated with bending and stretching vibrations of C−H bonds, respectively [32]. This indicates that the films may contain carbon as a background impurity.…”

Section: Resultsmentioning

confidence: 90%

Composition and optical properties of amorphous plasma-chemical silicon oxynitride of variable composition a-SiO-=SUB=-x-=/SUB=-N-=SUB=-y-=/SUB=- : H

Volodin V. A.,

Kamaev G. N.,

Gritsenko V. A.

et al. 2023

Technical Physics

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The a-SiOxNy : H films of various compositions were obtained by plasma chemical deposition from a gas mixture of 10% monosilane (diluted with argon) and nitrogen in the presence of residual oxygen in the working gas mixture. The nitrogen flow rate varied in the range from 4 to 6 cm3/min, the power of the high-frequency generator (13.56 MHz) varied in the range of 50-150 Watts. The electronic structure and optical properties of the films were studied using X-ray photoelectron spectroscopy, vibrational spectroscopy, transmission and reflection spectroscopy, and spectral ellipsometry. It is shown that, as the generator power decreases, the content of excess silicon in the films increases and amorphous silicon nanoclusters appear. As the generator power increases, the oxygen concentration in the films decreases. Apparently, this is due to the greater dissociation of molecular nitrogen with an increase in the power of the plasma discharge and an increase in the concentration of active nitrogen. Thus, it is possible to control the composition of aa-SiOxNy : H films not only by changing the nitrogen flow, but also by varying the generator power. Keywords: silicon oxynitride, plasma-chemical deposition, stoichiometric composition, Si nanoclusters.

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Section: Resultsmentioning

confidence: 90%

Composition and optical properties of amorphous plasma-chemical silicon oxynitride of variable composition a-SiO-=SUB=-x-=/SUB=-N-=SUB=-y-=/SUB=- : H

Volodin V. A.,

Kamaev G. N.,

Gritsenko V. A.

et al. 2023

Technical Physics

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“…According to experimental and calculated data [20], absorption peaks in the area of 655-677 cm The observed widening of the short-wave wing of 900-1200 cm -1 peak seems to occur due to the appearance of a small absorption peak in the area of 1170 cm -1 , typical for Si-O-C bond [13,21,22].…”

Section: Sio 2 +Si =2siomentioning

confidence: 99%

Use of powder silicon as a photocurable resin filler for laser stereolithography and prospects for transforming stereolithographic parts with silicon from polymeric to ceramic ones.

Markov¹,

Vnuk²,

Ippolitov³

et al. 2020

Preprint

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The article deals with the peculiarities of using silicon micropowder as a chemically inert filler when creating photocurable resins (PCR) for laser stereolithography. The authors provide the results of their experiments on making three-dimensional parts from such resins and discuss the feasibility of transforming the parts from polymeric, containing a filler, into ceramic ones through annealing. The use of silicon allows for a two-fold increase in the mass of the ceramic component due to the interaction of silicon with air oxygen and with products resulting from the thermal decomposition of the photopolymer's polymer base.

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“…На первом этапе спектроскопических исследований проанализированы ИК спектры пропускания пленкообразующих золей ортокремниевой кислоты с различной начальной концентрацией наночастиц (рис. их качественному составу, детальная идентификация которых изложена в работе [22]. С точки зрения исследования эволюции фрактальных нанообъектов основной интерес представляют моды при 960 и 1080 cm −1 , соответствующие валентным симметричным колебаниям связей Si−OH и Si−O−Si соответственно.…”

Section: спектроскопические исследования эволюции фрактальных нанообъunclassified

Спектроскопические Исследования Эволюции Фрактальных Нанообъектов В Пленкообразующих Золях Ортокремниевой Кислоты

Аверин¹,

Игошина²,

Карманов³

et al. 2018

Журнал Технической Физики

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Correlations in infrared spectra of nanostructures based on mixed oxides

Cited by 26 publications

References 17 publications

Composition and optical properties of amorphous plasma-chemical silicon oxynitride of variable composition a-SiO-=SUB=-x-=/SUB=-N-=SUB=-y-=/SUB=- : H

Composition and optical properties of amorphous plasma-chemical silicon oxynitride of variable composition a-SiO-=SUB=-x-=/SUB=-N-=SUB=-y-=/SUB=- : H

Use of powder silicon as a photocurable resin filler for laser stereolithography and prospects for transforming stereolithographic parts with silicon from polymeric to ceramic ones.

Спектроскопические Исследования Эволюции Фрактальных Нанообъектов В Пленкообразующих Золях Ортокремниевой Кислоты

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