The miniaturization of a V-shaped transducer ultrasonic motor (VSM) was carried out. The head block design and nut length were optimized to match resonance frequencies without coupling asymmetric and spurious vibrations. The volume of the new miniaturized VSM was 58% of that of the original VSM. The speed, thrust, and resolution of the new VSM compared favorably with those of the original VSM. A massive ceramics linear stage was driven by the new VSM working in the sole-use VSM feedback control system. For a traveling distance of 20 mm, the stage motion was controlled to remain in the target position plus or minus 1 nm within 350 ms.
An ultrasonic motor using two bolt-clamped Langevin-type transducers was described. A rigorous optimization of the motor's structure was conducted and its results are reported in regard to various motor parameters. Based on FEM analysis and experimental results it was established that symmetric and anti-symmetric resonance frequencies could be matched by adjusting the mass of the tip of the motor's head block. The driving voltage of the motor was reduced by using stacked multilayered piezo-elements. The velocity of the motor fabricated in this study was more than 1.5 m/s and 25 N in a condition. However, a velocity of less than 100 mm/s could not be achieved using conventional resonance driving. In the case of a velocity lower than 1 mm/s, driving was achieved by ''inertial driving.'' 1.5 nm resolution was observed using DC driving.
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