In this work, we demonstrate the first prototype of a thermal-bubble-based two-dimensional (2-D) micromachined accelerometer. The only moving element in this accelerometer is a thermal-bubble created by vaporizing the working liquid contained in the chamber. The accelerometer consists mainly of a heating resistor and two pairs of temperature detectors placed symmetrically and orthogonally. The prototype devices indicated that a sensitivity of 1.5 °C /g for an operating power of 60 mW can be realized. The frequency response of the accelerometer containing DI water is measured to be 200 Hz, and the corresponding noise equivalent acceleration (NEA) is approximately 1 mg/Hz 1/2 .
We report a novel prototype of a two-dimensional micromachined accelerometer based on thermocapillary heat transfer. The only moving element in this accelerometer is a thermal bubble generated by vaporizing the working liquid in the microchamber. The accelerometer consists of two key components, a heating resistor for creating symmetrical temperature profiles and two pairs of temperature detectors placed symmetrically and orthogonally to each other. The prototype devices demonstrate that a sensitivity of 1.5°C/g for an operating power of 60 mW can be realized. The frequency response of the accelerometer containing deionized water is 200 Hz, and the corresponding noise equivalent acceleration is ϳ1 mg/Hz 1/2 .
This study presents two designs to enhance the magnetostatic torque to drive the scanner, (1) the lever arm, and (2) the ferromagnetic material pattern with higher length to width ratio.
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