A Novel Two-Dimensional Micromachined Accelerometer Based on Thermocapillary Heat Transfer

Abstract

In this work, we demonstrate the first prototype of a thermal-bubble-based two-dimensional (2-D) micromachined accelerometer. The only moving element in this accelerometer is a thermal-bubble created by vaporizing the working liquid contained in the chamber. The accelerometer consists mainly of a heating resistor and two pairs of temperature detectors placed symmetrically and orthogonally. The prototype devices indicated that a sensitivity of 1.5 °C /g for an operating power of 60 mW can be realized. The frequency response of the accelerometer containing DI water is measured to be 200 Hz, and the corresponding noise equivalent acceleration (NEA) is approximately 1 mg/Hz 1/2 .

微尺度下台阶结构对气泡的约束作用及临界失效体积

“…在计算机技术方面, 微气泡被研究用以设计新型的微散热器 [11] . 不仅是 微流体器件, 微气泡近来也被应用到传统 MEMS 器 件中, Liao 等 [12,13] 设计了以密闭液体腔内的热气泡作 为敏感元的微型加速度计, 它具有无运动质量块、高 频响、高灵敏度等优点.…”

Role of step-shape structures and critical failure bubble volume in micro bubble constraint

“…In computer technology, micro bubbles are studied to create micro heat exchangers or cooling systems for electronic devices [11]. Besides micro fluidic systems, micro bubbles are also applied to conventional MEMS devices such as accelerometers, and have the advantages of no solid-proof mass, good frequency response and high sensitivity [12,13].…”