A polymer-based sensor for low frequency acceleration detection is fabricated by using microinjection molding technologies. Finite Element simulations and characterization of the sensing functionality are done. Due to an out-of-plane acceleration a force is applied to a seismic mass (length and width each 3.2 mm, thickness 1 mm), which leads to a deformation of a connected plate with dimensions of 1 mm × 1 mm × 50 ?m. Thus, charge separation at the electrodes of integrated piezoelectric polyvinylidene fluoride (PVDF) copolymer sheets occur and can be measured as sensor signal. A charge sensitivity of 0.57 pC/g is determined which is in good agreement with the simulation results. A resonance frequency of 660 Hz was measured. Furthermore, the sensor concept as well as preparation technologies to assemble a compound structure containing piezoelectric layers and the system integration by micro injection molding are discussed. In addition, different bonding techniques for the assembly of the functional components are investigated and described
A 2D scanning micromirror with piezoelectric thin film aluminum nitride (AlN), separately used as actuator and sensor material, is presented. For endoscopic applications, such as fluorescence microscopy, the devices have a mirror plate diameter of 0.7 mm with a 4 mm2 chip footprint. After an initial design optimization procedure, two micromirror designs were realized. Different spring parameters for x- and y-tilt were chosen to generate spiral (Design 1) or Lissajous (Design 2) scan patterns. An additional layout, with integrated tilt angle sensors, was introduced (Design 1-S) to enable a closed-loop control. The micromirror devices were monolithically fabricated in 150 mm silicon-on-insulator (SOI) technology. Si (111) was used as the device silicon layer to support a high C-axis oriented growth of AlN. The fabricated micromirror devices were characterized in terms of their scanning and sensor characteristics in air. A scan angle of 91.2° was reached for Design 1 at 13 834 Hz and 50 V. For Design 2 a scan angle of 92.4° at 12 060 Hz, and 123.9° at 13 145 Hz, was reached at 50 V for the x- and y-axis, respectively. The desired 2D scan patterns were successfully generated. A sensor angle sensitivity of 1.9 pC/° was achieved.
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