This paper describes a procedure for making topologically complex three-dimensional microfluidic channel systems in poly(dimethylsiloxane) (PDMS). This procedure is called the "membrane sandwich" method to suggest the structure of the final system: a thin membrane having channel structures molded on each face (and with connections between the faces) sandwiched between two thicker, flat slabs that provide structural support. Two "masters" are fabricated by rapid prototyping using two-level photolithography and replica molding. They are aligned face to face, under pressure, with PDMS prepolymer between them. The PDMS is cured thermally. The masters have complementary alignment tracks, so registration is straightforward. The resulting, thin PDMS membrane can be transferred and sealed to another membrane or slab of PDMS by a sequence of steps in which the two masters are removed one at a time; these steps take place without distortion of the features. This method can fabricate a membrane containing a channel that crosses over and under itself, but does not intersect itself and, therefore, can be fabricated in the form of any knot. It follows that this method can generate topologically complex microfluidic systems; this capability is demonstrated by the fabrication of a "basketweave" structure. By filling the channels and removing the membrane, complex microstructures can be made. Stacking and sealing more than one membrane allows even more complicated geometries than are possible in one membrane. A square coiled channel that surrounds, but does not connect to, a straight channel illustrates this type of complexity.

Microcontact printing (mu CP) has been used to produce patterned self-assembled monolayers (SAMs) with submicrometer features on curved substrates with radii of curvature as small as 25 micrometers. Wet-chemical etching that uses the patterned SAMs as resists transfers the patterns formed by mu CP into gold. At present, there is no comparable method for microfabrication on curved surfaces.

This paper describes the fabrication of large (up to 45 cm(2)) arrays of microwells, with volumes as small as ∼3 fL/well and densities as high as 10(7) wells/cm(2). These arrays of microwells are formed by casting an elastomer, poly(dimethylsiloxane) (PDMS), against "masters" prepared by photolithography; arrays of microwells in other polymers can be formed by using a master consisting of posts in PDMS. A straightforward technique, discontinuous dewetting, allows wells to be filled rapidly (typically on the order of 10(4) wells/s) and uniformly with a wide range of liquids. Several rudimentary strategies for addressing microwells are investigated, including electroosmotic pumping and gaseous diffusion.

Bringing an elastomeric phase mask into conformal contact with a layer of photoresist makes it possible to perform photolithography in the near field of the mask. This technique provides an especially simple method for forming features with sizes of 90-100 nm in photoresist: straight lines, curved lines, and posts, on both curved and planar surfaces. It combines experimental convenience, new optical characteristics, and applicability to nonplanar substrates into a new approach to fabrication. Nanowire polarizers for visible light illustrate one application for this technique.

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This paper describes a method for fabricating microfluidic devices in a photodefinable epoxy . This technique is compatible with, and complementary to, conventional fabrication techniques. It allows microstructures formed in SU-8 to be bonded to produce sealed microfluidic channels. A micromixer fabricated entirely in SU-8, using this technique, for performing liquid-phase reactions is shown to be suitable for visible spectroscopy. This fabrication method also allows the incorporation of materials that are often difficult to integrate. By fabricating hybrid devices that incorporate quartz windows, we demonstrate that these devices are compatible with organic solvents and that in situ ultraviolet detection in a microfluidic system is possible.

The phase separation of ultrathin polymer-blend films of polystyrene and polybutadiene on microcontact printed alkanethiol patterns with hydrophobic and hydrophilic end groups (-CHj and-COOH) is investigated by atomic force microscopy. Simulations suggest that the phase-separatiol morphology can be contmlled tkough pattems that modulate the polymer-surface interaction, and this concept is verified experimentally. l€ngth scale pattern control is found to be limited to a scale on the order of a few micrometers. [s l 063-65 l x(98)s0406-0]