2000
DOI: 10.1021/ac9912294
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Fabrication of Topologically Complex Three-Dimensional Microfluidic Systems in PDMS by Rapid Prototyping

Abstract: This paper describes a procedure for making topologically complex three-dimensional microfluidic channel systems in poly(dimethylsiloxane) (PDMS). This procedure is called the "membrane sandwich" method to suggest the structure of the final system: a thin membrane having channel structures molded on each face (and with connections between the faces) sandwiched between two thicker, flat slabs that provide structural support. Two "masters" are fabricated by rapid prototyping using two-level photolithography and … Show more

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Cited by 658 publications
(510 citation statements)
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“…The tetra-PEG gel layer was bonded to the PDMS sheet by HRMB, while the PDMS sheet was tightly attached to the slide glass by standard oxygen plasma treatment. 30 A uniform pressure was applied to one…”
Section: A Hydrogel Reactive Microbonding (Hrmb) Methodsmentioning
confidence: 99%
“…The tetra-PEG gel layer was bonded to the PDMS sheet by HRMB, while the PDMS sheet was tightly attached to the slide glass by standard oxygen plasma treatment. 30 A uniform pressure was applied to one…”
Section: A Hydrogel Reactive Microbonding (Hrmb) Methodsmentioning
confidence: 99%
“…Whitesides et al [12][13][14] in the late nineties, describing procedures for rapid prototyping of microfluidic structures, PDMS has become the best-known and most popular material for realizing microfluidic structures in scientific research and deservedly so. It is optically transparent, mechanically strong but flexible, chemically inert, biocompatible, and highly gas permeable, has excellent working properties, can be processed in any laboratory without the need for expensive equipment, and can be combined with a large variety of other materials.…”
Section: Pdms-based Actuatorsmentioning
confidence: 99%
“…We used gold and glass for their known biocompatibility, and for ease of integration with polydimethylsiloxane ͑PDMS͒-based microfluidic structures 18 ͑we note that the Cr adhesion layer was entirely covered in gold, and thus not exposed to fluid during measurements͒.…”
Section: Nanoscale Impedance Sensormentioning
confidence: 99%