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Six European National Measurement Institutes (NMIs) have joined forces within the European Metrology Research Programme funded project NANOTRACE to develop the next generation of optical interferometers having a target uncertainty of 10 pm. These are needed for NMIs to provide improved traceable dimensional metrology that can be disseminated to the wider nanotechnology community, thereby supporting the growth in nanotechnology. Several approaches were followed in order to develop the interferometers. This paper briefly describes the different interferometers developed by the various partners and presents the results of a comparison of performance of the optical interferometers using an x-ray interferometer to generate traceable reference displacements.

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X-ray interferometry is emerging as an important tool for dimensional nanometrology both for sub-nanometre measurement and displacement. It has been used to verify the performance of the next generation of displacement measuring optical interferometers within the European Metrology Research Programme project NANOTRACE. Within this project a more detailed set of comparison measurements between the x-ray interferometer and a dual channel Fabry–Perot optical interferometer (DFPI) have been made to demonstrate the capabilities of both instruments for picometre displacement metrology. The results show good agreement between the two instruments, although some minor differences of less than 5 pm have been observed.