properties of film that is formed as a result of sequential, plasma assisted fragmentation and deposition of vapours of acrylic acid and tetraethyl ortho silicate (TEOS). In this context, TEOS serves as an adhesion layer to the plastic substrate and also as a network-building layer for further cross-linking with acrylic acid. The presence of silanols (Si-OH) can facilitate large uptake of water molecules and cause significant hydration of the layer, which in combination with high total negative charge lowers the non specific binding of biomolecules..-2 -The reactivity of the carboxyl functionalities was confirmed by total internal reflection ellipsometry technique in a reaction with amino terminated ssDNA. Ageing studies of the film showed long term stability over 50 days. Overall, the specific combination of TEOS and acrylic acid deposited by plasma assisted vapour method results in film with an increased percentage of carboxyl groups to 16.4% as compared to that of 6.5% in acrylic acid as determined in the core level C 1s XPS spectrum and a significant increase in signal to noise ratio.
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