Several continuous SiC and SiC/N‐based ceramic fibers prepared from different polymer precursors have been characterized using X‐ray diffraction (XRD), transmission electron microscopy (TEM), electron energy loss spectroscopy (EELS), and high‐resolution electron microscopy (HREM). Methods to prepare longitudinal as well as cross‐sectional thin specimens from brittle ceramic fibers were developed to facilitate HREM and EELS studies. Lattice images clearly showed nanometer‐sized crystallites, as well as amorphous regions. Microchemical analysis using EELS permitted study of the form and distribution of the various chemical species within the fibers.
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