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Anodic Aluminum Oxide (AAO) nanotemplate, is a kind of layer made by anodizing a thin film of aluminum on a substrate. It contains alternate arrays and pores in the dimension of nanometer scale, which is currently being used to fabricate nano devices, magnetic nanostructures, polymeric nanowires, super conductors and nanofibers. This structure contains orderly columnar hexagonal porous cells. In this research, we have fabricated AAO nanotemplates on glass and pure aluminum substrate. In our research we have kept the temperature, concentration and voltage constant but the time was a variable. We observed that the dimensions of hexagonal pores increased with a linear speed of 100 nm per hour. Also the effect of annealing on the nanostructure is investigated. After analyzing annealed structure, it was observed that it is homogenous.the substrate should have smoothness in the atomic scale. They should be neutral against each other, so chemical reaction is required if there is an evidence of thin film coating. It is obvious that high temperature will increase the reaction between two layers. The different materials for thin films have various characteristics. Several materials, such as metals, halides, oxides and sulfides, in the form of crystal or amorphous on the glass substrate can be produced [12][13][14]. The mechanism of formation can be either physical or completely chemical reactions. This method was a vacuum of 10 -6 -10 -8 mbar for producing thin films [1,13]. Experimental Electron beam physical vapor depositionA method based on electron beam vaporization was used to obtain high quality thin film. The method can vaporize refractory metals with high melting points. Non-metals evaporation is also feasible. A 270 o bent beam off-axis electron source manufactured by multistation automatic coater Balzers is used. Acceleration of the electrons were created by a high voltage of 6-10 kV. Anodizing processIn this process, the aim is to create aluminum oxide layer on the surface, in which the aluminum metal (the aluminum thin film with high purity) is used as anode and platinum as

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