This paper shows that in situ micromachining can be used to simultaneously position and define (i) support particles, (ii) convective transport channels, (iii) an inlet distribution network of channels, and (iv) outlet channels in multiple chromatography columns on a single quartz wafer to the level of a few tenths of a micrometer. Stationary phases were bonded to 5 x 5 x 10 microns collocated monolith support structures separated by rectangular channels 1.5 microns wide and 10 microns deep with a low degree of deviation of channel width between the top and bottom of channels. High aspect ratio microfabrication can only be achieved with deep reactive ion etching. The volume of a 150 microns x 4.5 cm column was 18 nL. Column efficiency was evaluated in the capillary electrochromatography (CEC) mode using rhodamine 123 and a hydrocarbon stationary phase. Plate heights in these columns were typically 0.6 micron in the nonretained and 1.3 microns in the retained modes of operation. Columns were designed to have identical mobile-phase velocity in all channels in an effort to minimize outgassing during operation. When the total lateral cross-sectional area of channels at all points along the separation axis is identical, linear velocity of the mobile phase in a CEC column should be the same. Columns were operated at atmospheric pressure.

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A surface plasmon polariton detector is demonstrated at infra-red wavelengths. The device consists of a metal stripe on silicon forming a Schottky contact thereon and supporting surface a plasmon polariton mode that is strongly confined and localised to the metal-semiconductor interface. Detection of optical radiation below the bandgap of silicon (at infrared wavelengths) occurs through internal photoemission. Responsivities of 0.38 and 1.04 mA/W were measured via end-fire coupling to a tapered optical fibre, at room temperature and at a wavelength of 1280 nm, for gold and aluminium stripes on n-type silicon, respectively. The device can be integrated with other structures used in nano-plasmonics, nano-photonics or silicon-based photonics, and it holds promise for short-reach optical interconnects and power monitoring applications.

Straight long-range surface plasmon waveguides are demonstrated as biosensors for the detection of cells, proteins and changes in the bulk refractive index of solutions. The sensors consist of 5 μm wide 22 nm thick Au stripes embedded in polymer (CYTOP™) with microfluidic channels etched into the top cladding. Bulk sensing is demonstrated by sequentially injecting six solutions of different refractive indices in 2 × 10(-3) RIU increments; such index steps were detected with a signal-to-noise ratio of ~1000. Selective capture of cells is demonstrated using Au waveguides functionalized with antibodies against blood group A, and red blood cells of group A and O in buffer as positive and negative analyte. Bovine serum albumin in buffer was used to demonstrate protein sensing. A monolayer of bovine serum albumin physisorbed on a carboxyl-terminated self-assembled monolayer on Au was detected with a signal-to-noise ratio of ~300. Overall, the biosensor demonstrated a good capability for detecting bulk changes in solution and for sensing analyte over a very wide range of mass (from cells to proteins). The biosensors are compact, inexpensive to fabricate, and may find use over a wide range of cost-sensitive sensing and detection applications.

We propose a plasmonic surface that produces an electrically controlled reflectance as a high-speed intensity modulator. The device is conceived as a metal-oxide-semiconductor capacitor on silicon with its metal structured as a thin patch bearing a contiguous nanoscale grating. The metal structure serves multiple functions as a driving electrode and as a grating coupler for perpendicularly incident p-polarized light to surface plasmons supported by the patch. Modulation is produced by charging and discharging the capacitor and exploiting the carrier refraction effect in silicon along with the high sensitivity of strongly confined surface plasmons to index perturbations. The area of the modulator is set by the area of the incident beam, leading to a very compact device for a strongly focused beam (∼2.5 μm in diameter). Theoretically, the modulator can operate over a broad electrical bandwidth (tens of gigahertz) with a modulation depth of 3 to 6%, a loss of 3 to 4 dB, and an optical bandwidth of about 50 nm. About 1000 modulators can be integrated over a 50 mm(2) area producing an aggregate electro-optic modulation rate in excess of 1 Tb/s. We demonstrate experimentally modulators operating at telecommunications wavelengths, fabricated as nanostructured Au/HfO2/p-Si capacitors. The modulators break conceptually from waveguide-based devices and belong to the same class of devices as surface photodetectors and vertical cavity surface-emitting lasers.

Long range surface plasmon-polariton waveguides and devices suitable for biosensing were fabricated and characterized physically and optically. The structures consist of thin (∼35 nm) patterned Au stripes embedded in thick Cytop claddings (∼8 μm each). Portions of Au stripes were exposed by patterning and etching though the top Cytop cladding using an O2 plasma etch. The etched Cytop cavities act as microfluidic channels to contain and direct the sensing fluid. Intermediate process steps were verified through physical characterization as were fully fabricated structures. Optical testing was performed on Cytop-embedded structures and on channel-filled (with sensing fluid) structures. The structures were excited through end-fire coupling to optical fibers.

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This work presents analytical solutions for both pressure-driven and electroosmotic flows in microchannels incorporating porous media. Solutions are based on a volume-averaged flow model using a scaling of the Navier-Stokes equations for fluid flow. The general model allows analysis of fluid flow in channels with porous regions bordering open regions and includes viscous forces, permitting consideration of porosity and zeta potential variations near channel walls. To obtain analytical solutions problems are constrained to the linearized Poisson-Boltzmann equation and a variation of Brinkman's equation [Appl. Sci. Res., Sect. A 1, 27 (1947); 1, 81 (1947)]. Cases include one continuous porous medium, two adjacent regions of different porosities, or one open channel adjacent to a porous region, and the porous material may have a different zeta potential than that of the channel walls. Solutions are described for two geometries, including flow between two parallel plates or in a cylinder. The model illustrates the relative importance of porosity and zeta potential in different regions of each channel.