1993
DOI: 10.1016/0040-6090(93)90378-3
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Modelling and characterization of columnar growth in evaporated films

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Cited by 406 publications
(233 citation statements)
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“…An empirical relationship between the incidence angle a and the inclination of texture b "tg a ¼ 2 tg b" has been previously reported for films grown by various methods. [33][34][35] The reverse situation is observed here. The position of the maximum of the main peak in Fig.…”
Section: Resultssupporting
confidence: 54%
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“…An empirical relationship between the incidence angle a and the inclination of texture b "tg a ¼ 2 tg b" has been previously reported for films grown by various methods. [33][34][35] The reverse situation is observed here. The position of the maximum of the main peak in Fig.…”
Section: Resultssupporting
confidence: 54%
“…Generally, under oblique angle deposition at RT by thermal evaporation or sputtering, the film texture is inclined towards the incident species direction, due to the shadowing effect and limited atom diffusion. [33][34][35] For the films grown by PLD at RT, we always observe an inclination of the c-axis in the forward direction, i.e., the reverse of the shadowing effect.…”
Section: Discussionmentioning
confidence: 99%
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“…Nieuwenhuizen and Haanstra 18 found a phenomenological relation between the column tilt angle, ␤, and the deposition angle, ␣, as tan͑␤͒ = 0.5 tan͑␣͒, that overestimates the former for increasingly oblique deposition ͑for ␣ = 85°it gives ␤ = 80°͒. On the other hand, Tait et al 19 assumed ballistic deposition and shadow effects leading to the relation 2 ϫ sin͑␣ − ␤͒ =1 − cos͑␣͒, that for ␣ = 85°gives ␤ = 58°, i.e., closer to our experimental value. Some other models have introduced additional parameters depending on the deposition rate or the diffusivity.…”
Section: Instituto De Ciencia De Materiales De Sevilla (Csic-mentioning
confidence: 99%