An N-doped, p-type ZnO layer has been grown by molecular beam epitaxy on an Li-diffused, bulk, semi-insulating ZnO substrate. Hall-effect and conductivity measurements on the layer give: resistivity=4×101 Ω cm; hole mobility=2 cm2/V s; and hole concentration=9×1016 cm−3. Photoluminescence measurements in this N-doped layer show a much stronger peak near 3.32 eV (probably due to neutral acceptor bound excitons), than at 3.36 eV (neutral donor bound excitons), whereas the opposite is true in undoped ZnO. Calibrated, secondary-ion mass spectroscopy measurements show an N surface concentration of about 1019 cm−3 in the N-doped sample, but only about 1017 cm−3 in the undoped sample.

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High-energy (>1.6 MeV) electrons create acceptors and donors in single-crystal ZnO. Greater damage is observed for irradiation in the [0001] direction (Zn face) than in the [0001̄] direction (O face). The major annealing stage occurs at about 300–325 °C, and is much sharper for defects produced by Zn-face irradiation, than for those resulting from O-face irradiation. The defects appear to have a chain character, rather than being simple, near-neighbor vacancy/interstitial Frenkel pairs. These experiments suggest that ZnO is significantly more “radiation hard” than Si, GaAs, or GaN, and should be useful for applications in high-irradiation environments, such as electronics in space satellites.

PACS 71.55. Gr, 72.80.Ey, 78.55.Et Hall-effect, photoluminescence (PL), and electron paramagnetic resonance (EPR) measurements have been performed in single-crystal ZnO samples annealed in air at 25, 550, 750, and 950 °C, for 30 min each. A 37 meV donor is dominant in the unannealed sample, but nearly disappears during the higher temperature anneals, and is replaced by a 67 meV donor. The 37 meV donor is responsible for a donorbound-exciton PL line at (3.3631 ± 0.0002) eV, which is dominant in the unannealed sample. The EPR measurements show that N O centers appear in the 750 °C and 950 °C anneals, and they are probably responsible for an increase in the acceptor concentration found from the Hall-effect results. A PL emission at (3.3570 ± 0.0002) eV, assigned in the literature as an acceptor-bound exciton, may involve N O complexes.