The stability of thin film transistors incorporating sputtered ZnO as the channel layer is investigated under gate bias stress. Positive stress results in a positive shift of the transfer characteristics, while negative stress results in a negative shift. Low bias stress has no effect on the subthreshold characteristics. This instability is believed to be a consequence of charge trapping at/near the channel/insulator interface. Higher biases and longer stress times cause degradation of the subthreshold slope, which is thought to arise as a consequence of defect state creation within the ZnO channel material. After all stress measurements, the devices recover their original characteristics at room temperature without any annealing.

The growth of large-area, patterned and oriented ZnO nanowires on silicon using a low temperature silicon-CMOS compatible process is demonstrated. Nanowire synthesis takes place using a thin nucleation layer of ZnO deposited by radiofrequency magnetron sputtering, followed by a hydrothermal growth step. No metal catalysts are used in the growth process. The ZnO nanowires have a wurtzite structure, grow along the c-axis direction and are distributed on the silicon substrate according to the pre-patterned nucleation layer. Room temperature PL measurements of the as-grown nanowires exhibit strong yellow-red emission under 325 nm excitation that is replaced by ultraviolet emission after annealing. This method can be used to integrate patterned 1D nanostructures in optoelectronic and sensing applications on standard silicon CMOS wafers.

Abstract-The performance and stability of thin-film transistors with zinc oxide as the channel layer are investigated using gate bias stress. It is found that the effective channel mobility, ON/OFF ratio, and subthreshold slope of the devices that incorporate SiN are superior to those with SiO 2 as the dielectric. The application of positive and negative stress results in the device transfer characteristics shifting in positive and negative directions, respectively. The devices also demonstrate a logarithmic time-dependent threshold voltage shift suggestive of charge trapping within the band gap and the band tails responsible for the deterioration of device parameters. It is postulated that this device instability is partly a consequence of the lattice mismatch at the channel/insulator interface. All stressed devices recover to near-original characteristics after a short period at room temperature without the need for any thermal or bias annealing.

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Alternative novel precursor chemistries for the vapor phase deposition of rare-earth (RE) oxide thin films were developed by synthesising the homoleptic guanidinate compounds tris(N,N'-diisopropyl-2-dimethylamidoguanidinato)-scandium(III) [Sc(DPDMG)(3)] (1), tris(N,N'-diisopropyl-2-dimethylamidoguanidinato)-erbium(III), [Er(DPDMG)(3)] (2) and tris(N,N'-diisopropyl-2-dimethylamidoguanidinato)-yttrium(III), [Y(DPDMG)(3)] (3). All three compounds are monomeric as revealed by single crystal X-ray diffraction (XRD) analysis, nuclear magnetic resonance (NMR) and electron impact mass spectrometry (EI-MS). The thermal analysis revealed that the compounds are volatile and very stable under evaporation conditions. Therefore the complexes were evaluated as precursors for the growth of Sc(2)O(3), Er(2)O(3) and Y(2)O(3) thin films, respectively, by metal-organic chemical vapor deposition (MOCVD). Uniform Sc(2)O(3), Er(2)O(3) and Y(2)O(3) films on Si(100) substrates with reproducible quality were grown by MOCVD by the combination of the respective guanidinate precursors and oxygen in the temperature range 350-700 °C. The structural, morphological, compositional and electrical properties of the films were investigated in detail. The most relevant film properties are highlighted in relation to the distinct advantages of the novel precursor chemistries in comparison to the commonly used literature known RE precursors. This study shows that compounds 1-3 are very good precursors for MOCVD yielding Sc(2)O(3), Er(2)O(3) and Y(2)O(3) thin films which are stoichiometric and display suitable electrical properties for their potential use as high dielectric constant (high-k) materials.