A kind of slurry which is applicable for fine atomizing CMP was made and the optimal results were obtained through orthogonal experiments by comparing fine atomizing CMP and traditional CMP. The research results show that the material removal rate of fine atomizing CMP is 52.23% of traditional CMP, and the dosage of the slurry used in fine atomizing CMP only accounts for 10 vol% compared to traditional CMP. The surface roughness after the fine atomizing CMP is 2.5nm which is better than that of the traditional CMP (3.0nm).
The method of chemical mechanical polishing (CMP) using slurry which was ultrasonic subtle atomized was researched, and the system of Ultrasonic Subtle Atomization—Chemical Mechanical Polishing was established. The effects of polish parameters on polishing were also investigated. The results show that the experimental system can fully realize the expected function of polishing, the use of slurry is about one-tenth of the amount of traditional CMP, material removal rate can reach 113.734nm/min and the surface roughness is similar to the surface roughness in the traditional way.
Compared with the traditional chemical mechanical polishing (CMP) technique, the precision atomization ultra-polishing (PAUP) technology has the advantages of friendly environmental and damage-free. This paper established a novel PAUP tester based on the atmospheric pressure theory, and explored the possibility of PAUP technique. Furthermore, effects of operated parameters on the material removal rate and surface roughness were investigated in PAUP process. It was found that a material removal rate of 78.302 nm/min was obtained with a surface roughness of 0.015 µm at the optimal parameters. This study provides insight into the development of the novel ultra-polishing methods and its underlying theoretical foundation.
The plutonium material within the nuclear devices would be aerosolized, released from the source-term and deposited in the soil after nuclear tests or accidents. Due to the natural and artificial disturbances the plutonium aerosols deposited in the soil would resuspend into the air. The hazard analysis of plutonium aerosol resuspension in typical dated nuclear-polluted regions is significative for radiation assessment and post-accident depuration in contaminated regions. The analysis shows that the soil eroding is the intrinsic factor of plutonium aerosol resuspension. The airborne contaminated concentration in non-nuclear source-term is much higher than nuclear source-term. The soil cleanup would lead to short-term rise of the airborne concentration. From the estimation of the equivalent dose, it is clear that the radiation hazards of the resuspended particulates in typical dated nuclear-polluted regions are extremely limited. After soil cleanup the annual effective doses of the contaminated regions are far below the radiation protection standards.
With the development of Internet technology, cloud computing has been widely applied to various industries as a new service delivery model in recent years. The cloud service providers must provide services for many customs at the same time. So a large number of different applications must be deployed and the application deployment problem becomes more and more important. How to deploy the application according to their different performance requirements has an important effect on improving the quality of service, enhancing user experience and reducing the service cost. However, for service providers, improving service quality and reducing service cost are contradictory. In this paper, the application deployment problem is modeled as the application deployment graph. Then by using the Pareto optimal thought, a multi-objective optimization algorithm is proposed. It makes that the service providers use less cost to provide the better service quality for users.
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