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All optical integrated upconversion fluorescence-based point temperature sensing system using Er 3+ -doped silica-on-silicon waveguides Rev. Sci. Instrum. 73, 476 (2002);On-chip integration of optical switches and planar light circuits ͑PLCs͒ can greatly reduce the size, manufacturing cost, and operating cost of multicomponent optical systems. A silicon-on-insulator platform for integrating microelectromechanical system ͑MEMS͒ latching optical waveguide switches with PLCs is presented including a working example of chip scale integration of reconfigurable-optical add/drop multiplexer and -Routers, along with details of the integrated latching MEMS optical switches.

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