Optical add and drop multiplexer using on-chip integration of planar light circuits and optical microelectromechanical system switching

Liu, Xueyuan; Kubby, Joel; Chen, Jingkuang; Diehl, James; Feinberg, Kathleen; German, K. A. H.; Gulvin, Peter; Herko, Larry; Jia, Nancy; Lin, Pinyen; Ma, Jun; Meyers, John; Nyström, Peter; Wang, Yao Rong

doi:10.1116/1.1644111

Cited by 6 publications

(2 citation statements)

References 7 publications

(3 reference statements)

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“…7 For AWGs, sidewall roughness not only increases transmission loss, but also increases crosstalk by introducing phase errors along the optical paths. 8 Losses and crosstalk associated with sidewall roughness are less evident in waveguides with larger cross sections, so again, choices must be made based on overall system requirements. As discussed throughout this section, design constraints are complex.…”

Section: Soi Planar Light Circuit Opticsmentioning

confidence: 99%

Optical MEMS platform for low-cost on-chip integration of planar light circuits and optical switching

et al. 2004

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Xerox Corporation has developed a technology platform for on-chip integration of latching MEMS optical waveguide switches and Planar Light Circuit (PLC) components using a Silicon On Insulator (SOI) based process. To illustrate the current state of this new technology platform, working prototypes of a Reconfigurable Optical Add/Drop Multiplexer (ROADM) and a λ-router will be presented along with details of the integrated latching MEMS optical switches. On-chip integration of optical switches and PLCs can greatly reduce the size, manufacturing cost and operating cost of multi-component optical equipment. It is anticipated that low-cost, low-overhead optical network products will accelerate the migration of functions and services from high-cost long-haul markets to price sensitive markets, including networks for metropolitan areas and fiber to the home. Compared to the more common silica-onsilicon PLC technology, the high index of refraction of silicon waveguides created in the SOI device layer enables miniaturization of optical components, thereby increasing yield and decreasing cost projections. The latching SOI MEMS switches feature moving waveguides, and are advantaged across multiple attributes relative to alternative switching technologies, such as thermal optical switches and polymer switches. The SOI process employed was jointly developed under the auspice of the NIST APT program in partnership with Coventor, Corning IntelliSense Corp., and MicroScan Systems to enable fabrication of a broad range of free space and guided wave MicroOptoElectroMechanical Systems (MOEMS).

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Section: Soi Planar Light Circuit Opticsmentioning

confidence: 99%

Optical MEMS platform for low-cost on-chip integration of planar light circuits and optical switching

et al. 2004

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“…7,8 Microelectromechanical systems ͑MEMS͒ are also promising for micro-optical switches. Liu et al 9 have studied a planar 2 ϫ 2 optical add-drop multiplexer deploying relative motion of silicon waveguides. However, the waveguides are 3 m wide and 5 m thick in size.…”

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confidence: 99%

Submicron silicon waveguide optical switch driven by microelectromechanical actuator

Bulgan¹,

Kanamori²,

Hane³

2008

Applied Physics Letters

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A submicron silicon waveguide optical switch driven by a microelectromechanical actuator is fabricated. The switch is composed of single-mode silicon input and output waveguides and a movable waveguide suspended by silicon springs. Switching occurs when the air gap between input and output waveguides is closed by displacing the movable waveguide 540Ϯ 20 nm by an electrostatic comb actuator. The switch, fabricated on a silicon-on-insulator wafer, is monolithic, and active switching region is as small as about 40ϫ 60 m 2. An extinction ratio of 15Ϯ 2 dB is experimentally obtained between switch off and on states at 1.55 m wavelength.

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Pre-shaped buckled-beam actuators: Theory and experiments

Park

Hah

2008

Sensors and Actuators A: Physical

103

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Optical add and drop multiplexer using on-chip integration of planar light circuits and optical microelectromechanical system switching

Cited by 6 publications

References 7 publications

Optical MEMS platform for low-cost on-chip integration of planar light circuits and optical switching

Optical MEMS platform for low-cost on-chip integration of planar light circuits and optical switching

Submicron silicon waveguide optical switch driven by microelectromechanical actuator

Pre-shaped buckled-beam actuators: Theory and experiments

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