The application of microelectromechanical systems (MEMS) to medicine is described. Three types of biomedical devices are considered, including diagnostic microsystems, surgical microsystems, and therapeutic microsystems. The opportunities of MEMS miniaturization in these emerging disciplines are considered, with emphasis placed on the importance of the technology in providing a better outcome for the patient and a lower overall health care cost. Several case examples in each of these areas are described. Key aspects of MEMS technology as it is applied to these three areas are described, along with some of the fabrication challenges.
Thieisa prejmintof apaperintended forpublication ina joumalorpmceedinga Since changes may be made before publication, this preprint ie made available with the understanding that it will not be cited 01 reproduced without the permission of the author.
Wehave developed a microfabricated flow-through impedance characterization system capable of performing AC, multi-frequency measurements on cells and other particles. The sensor measures both the resistive and reactive impedance of passing particles, at rates of up to 100 particles per second. Its operational bandwidth approaches 10 MHz with a signal-tonoise ratio of approximately 40 dB. Partide impedance is measured at three or more frequencies simultaneously, enabling the derivation of multiple particle parameters. This constitutes an improvement to the well-established technique of DC particle sizing via the Coulter Principle. Human peripheral blood granulocyte radius, membrane capacitance, and cytoplasmic conductivity were measured (r = 4.1 f.!m, Cmem = 0.9 f.!F/cm 2 , O"int = 0.66 S/m) and were found to be consistent with published values.
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