1996
DOI: 10.1109/84.546407
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Thin film shape memory alloy microactuators

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Cited by 497 publications
(264 citation statements)
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“…Shape-memory materials have the largest energy output per unit volume per cycle of known actuator systems [36]. This fact, together with the enhanced rate of heat transfer in thin ®lms, makes these alloys ideal for microactuator, micropump and for microelectromechanical systems (MEMS) applications and this has motivated many experimental e orts (see, e.g.…”
Section: Introductionmentioning
confidence: 99%
“…Shape-memory materials have the largest energy output per unit volume per cycle of known actuator systems [36]. This fact, together with the enhanced rate of heat transfer in thin ®lms, makes these alloys ideal for microactuator, micropump and for microelectromechanical systems (MEMS) applications and this has motivated many experimental e orts (see, e.g.…”
Section: Introductionmentioning
confidence: 99%
“…Both SME and SE are the phenomena related with thermoelastic martensitic transformation, and the shape recoverable stain depends on crystallographic difference between parent and martensite phases. It is known that SMAs exhibit the highest work per volume ( ¼ force £ strain/volume) of actuator materials [1]. It is also known that, although a large number of SMAs have been reported, only Ti -Ni SMA is practically and industrially used.…”
Section: Introductionmentioning
confidence: 99%
“…SE achieved at present exceeds 5% for a Ti -Nb -Al SMA. Third problem is a limited frequency in motion around 100 -200 Hz in comparison with 10 8 Hz for piezoelectric materials such as PZT [1]. The reason of low frequency is that the speed of motion is limited by heat transfer since heating and cooling cycles are required for the appearance of SME.…”
Section: Introductionmentioning
confidence: 99%
“…Thin films of shape-memory alloys have received attention as potential microactuators since the recognition that they possess the largest work per unit volume among possible actuator systems [7]. This is because the martensitic phase transformation, a solid-to-solid phase transformation responsible for the shape-memory effect, provides a direct link between the macroscopic deformation and microscopic changes in the crystalline unit cell.…”
Section: Introductionmentioning
confidence: 99%