The Near Infrared Mapping Spectrometer performed spectral studies of Jupiter and the Galilean satellites during the June 1996 perijove pass of the Galileo spacecraft. Spectra for a 5-micrometer hot spot on Jupiter are consistent with the absence of a significant water cloud above 8 bars and with a depletion of water compared to that predicted for solar composition, corroborating results from the Galileo probe. Great Red Spot (GRS) spectral images show that parts of this feature extend upward to 240 millibars, although considerable altitude-dependent structure is found within it. A ring of dense clouds surrounds the GRS and is lower than it by 3 to 7 kilometers. Spectra of Callisto and Ganymede reveal a feature at 4. 25 micrometers, attributed to the presence of hydrated minerals or possibly carbon dioxide on their surfaces. Spectra of Europa's high latitudes imply that fine-grained water frost overlies larger grains. Several active volcanic regions were found on Io, with temperatures of 420 to 620 kelvin and projected areas of 5 to 70 square kilometers.

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The ability to extract critical parameters using scatterometry depends on the parameter sensitivity and correlation at different wavelengths. These, in turn, determine the key metrics: accuracy, precision, and tool-to-tool matching. Parameter sensitivity and correlation can vary drastically, depending on whether the oblique incident light beam is parallel (azimuth angle = 90 degrees), perpendicular (azimuth angle = 0 degrees), or at an intermediate angle to the measured structures. In this paper, we explore the use of both variable-and multiple-azimuth (AZ) (or multi-AZ) angle spectroscopic ellipsometry (SE) to optimize the measurement performance for different applications.The first example compares the sensitivity and results using SE at 0 and 90 degree AZ angles for a BEOL post-litho metal trench application. We observe up to a sixfold improvement in key metrics for critical parameters using 90 degree over 0 degree AZ angle spectra.The second example illustrates the benefits of a multiple-AZ angle approach to extract critical parameters for a twodimensional logic High-K Metal Gate (HKMG) structure. Typically, this approach simultaneously fits two sets of SE spectra collected from the same location on the wafer at different AZ angles with the same physical model. This helps both validate and decorrelate critical parameters, enabling robust measurements. Results show that, for this application, the measurement performance metrics for each critical parameter are improved in almost every case.

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