In this paper, we have proposed a metal-insulator-metal (MIM) pressure sensor which consists of two plasmonic waveguides and a double square ring resonator. The two square rings are connected via a rectangular patch located between the two of them. The surface plasmon polaritons (SPPs) can be transferred from a square ring to the other through this patch. The finite-difference time-domain method (FDTD) has been used to simulate the device. Applying a pressure on the structure, it deforms, and a red shift of 103 nm in the resonance wavelength has been calculated. The deformation is linearly proportional to the wavelength shift in a wide range of wavelength. The proposed optical plasmonic pressure sensor has a sensitivity of 16.5 nm/MPa which makes it very suitable for using in biological and biomedical engineering.
We propose a metal-insulator-metal (MIM) structure consisting of a resonator and surface plasmon polariton (SPP) waveguides. By increasing the pressure, the resonator further deforms. Applying a maximum pressure of 6.2 MPa on the proposed device, a blue shift of 150 nm in the resonant
wavelength is computed. Under the above mentioned pressure, the corresponding shift is linearly proportional to the pressure variation in a wide range of wavelength. This optical pressure sensor has a high sensitivity of 24 nm/MPa which makes it very suitable candidate for mechanical, electrical,
biological, and biomedical engineering applications. The proposed device is simulated using finite-difference time-domain (FDTD) method.
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