2018
DOI: 10.1166/jno.2018.2375
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High Sensitive Optical Pressure Sensor Using Nano-Scale Plasmonic Resonator and Metal-Insulator-Metal Waveguides

Abstract: We propose a metal-insulator-metal (MIM) structure consisting of a resonator and surface plasmon polariton (SPP) waveguides. By increasing the pressure, the resonator further deforms. Applying a maximum pressure of 6.2 MPa on the proposed device, a blue shift of 150 nm in the resonant wavelength is computed. Under the above mentioned pressure, the corresponding shift is linearly proportional to the pressure variation in a wide range of wavelength. This optical pressure sensor has a high sensitivity of 24 nm/M… Show more

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Cited by 6 publications
(3 citation statements)
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“…Metal-insulator-metal (MIM) structures can propagate SPPs at the subwavelength dimensions with light confinement properties [4]. So, these structures have been used in many applications such as Mach-Zehnder interferometers [5][6][7][8], Bragg reflectors [9,10], demultiplexers [11,12], sensors [13][14][15][16][17][18], modulators [19], filters [20,21], and optical switches [22,23]. Plasmonic filters based on the MIM waveguide structures provide effective solutions for comparatively high propagation loss due to large size [24].…”
Section: Introductionmentioning
confidence: 99%
“…Metal-insulator-metal (MIM) structures can propagate SPPs at the subwavelength dimensions with light confinement properties [4]. So, these structures have been used in many applications such as Mach-Zehnder interferometers [5][6][7][8], Bragg reflectors [9,10], demultiplexers [11,12], sensors [13][14][15][16][17][18], modulators [19], filters [20,21], and optical switches [22,23]. Plasmonic filters based on the MIM waveguide structures provide effective solutions for comparatively high propagation loss due to large size [24].…”
Section: Introductionmentioning
confidence: 99%
“…Palzvan et al proposed a pressure sensor composed of two MIM waveguides and a double ring resonator, with a sensitivity of 16.5 nm/MPa, suitable for biological and biomedical engineering [40]. After that, by increasing the pressure, the resonator is further deformed into a new structure, and the sensitivity is improved to 24 nm/MPa [41]. At the same time, some sensors with higher sensitivity and wider applicability have also been designed.…”
Section: Introductionmentioning
confidence: 99%
“…Some of the literature includes thermo-mechanical studies that focus on the main mechanisms which drive the evolution of the residual stresses, strains, and deformations based on the incorporation of fibre optical sensors (FOS) into composite beams [19,20]. Pressure is another parameter that has been studied by embedding FOS based on acoustic emission or plasmonic resonators [21,22], or even the study and experimentation of automated produced pultruded beams with FOS [23,24].…”
Section: Introductionmentioning
confidence: 99%