We report the specific transduction, via surface stress changes, of DNA hybridization and receptor-ligand binding into a direct nanomechanical response of microfabricated cantilevers. Cantilevers in an array were functionalized with a selection of biomolecules. The differential deflection of the cantilevers was found to provide a true molecular recognition signal despite large nonspecific responses of individual cantilevers. Hybridization of complementary oligonucleotides shows that a single base mismatch between two 12-mer oligonucleotides is clearly detectable. Similar experiments on protein A-immunoglobulin interactions demonstrate the wide-ranging applicability of nanomechanical transduction to detect biomolecular recognition.

This paper describes the characterization of a home-made negative photoresist developed by IBM. This resist, called SU-8, can be produced with commercially available materials. Three blends were prepared for this article and some of its optical and mechanical properties are presented. One of its numerous advantages is the broad range of thicknesses which can be obtained in one spin: from 750 nm to 450 µm with a conventional spin coater. The resist is exposed with a standard UV aligner and has an outstanding aspect ratio near 15 for lines and 10 for trenches. These ratios combined with the electroplating of copper allow the fabrication of highly integrated electromagnetic coils.

We present a new scanning-probe-based data-storage concept called the "millipede" that combines ultrahigh density, terabit capacity, small form factor, and high data rate. Ultrahigh storage density has been demonstrated by a new thermomechanical local-probe technique to store, read back, and erase data in very thin polymer films. With this new technique, nanometer-sized bit indentations and pitch sizes have been made by a single cantilever/tip into thin polymer layers, resulting in a data storage densities of up to 1 Tb/in 2 . High data rates are achieved by parallel operation of large two-dimensional (2-D) atomic force microscope (AFM) arrays that have been batch-fabricated by silicon surface-micromachining techniques. The very large-scale integration (VLSI) of micro/nanomechanical devices (cantilevers/tips) on a single chip leads to the largest and densest 2-D array of 32 32 (1024) AFM cantilevers with integrated write/read/erase storage functionality ever built. Time-multiplexed electronics control the functional storage cycles for parallel operation of the millipede array chip. Initial areal densities of 100-200 Gb/in 2 have been achieved with the 32 32 array chip, which has potential for further improvements. A complete prototype system demonstrating the basic millipede functions has been built, and an integrated five-axis scanner device used in this prototype is described in detail. For millipede storage applications the polymer medium plays a crucial role. Based on a systematic study of different polymers with varying glass-transition temperatures, the underlying physical mechanism of bit writing has been identified, allowing the correlation of polymer properties with millipede-relevant parameters. In addition, a novel erase mechanism has been established that exploits the metastable nature of written bits.Index Terms-Atomic force microscope (AFM) array chips, microscanner, millipede, nano-indentation, polymer films, scanning probe data storage, thermomechanical write/read/erase.

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Nanomechanical cantilever sensors have been emerging as a key device for real-time and label-free detection of various analytes ranging from gaseous to biological molecules. The major sensing principle is based on the analyte-induced surface stress, which makes a cantilever bend. In this letter, we present a membrane-type surface stress sensor (MSS), which is based on the piezoresistive read-out integrated in the sensor chip. The MSS is not a simple "cantilever," rather it consists of an "adsorbate membrane" suspended by four piezoresistive "sensing beams," composing a full Wheatstone bridge. The whole analyte-induced isotropic surface stress on the membrane is efficiently transduced to the piezoresistive beams as an amplified uniaxial stress. Evaluation of a prototype MSS used in the present experiments demonstrates a high sensitivity which is comparable with that of optical methods and a factor of more than 20 higher than that obtained with a standard piezoresistive cantilever. The finite element analyses indicate that changing dimensions of the membrane and beams can substantially increase the sensitivity further. Given the various conveniences and advantages of the integrated piezoresistive read-out, this platform is expected to open a new era of surface stress-based sensing.

We report a simple atomic force microscopy-based concept for a hard disk-like data storage technology. Thermomechanical writing by heating a Si cantilever in contact with a spinning polycarbonate disk has already been reported. Here the medium has been replaced with a thin polymer layer on a Si substrate, resulting in significant improvements in storage density. With this new medium, we achieve bit sizes of 10-50 nm, leading to data densities of 500 Gbit/in. 2 . We also demonstrate a novel high-speed and high-resolution thermal readback method, which uses the same Si cantilevers that are used in the writing process, and the capability to erase and rewrite data features repeatedly.

Heat conduction governs the ultimate writing and reading capabilities of a thermomechanical data storage device. This work investigates transient heat conduction in a resistively heated atomic force microscope cantilever through measurement and simulation of cantilever thermal and electrical behavior. The time required to heat a single cantilever to bit-writing temperature is near 1 μs and the thermal data reading sensitivity ΔR/R is near 1×10−4 per vertical nm. Finite-difference thermal and electrical simulation results compare well with electrical measurements during writing and reading, indicating design tradeoffs in power requirements, data writing speed, and data reading sensitivity. We present a design for a proposed cantilever that is predicted to be faster and more sensitive than the present cantilever.