In this paper, we present the design and performance of a MEMS-device based on the magnetostrictive effect, which can be used as a micro-loudspeaker. The device basically consists of a comb structure of monomorph bending cantilevers with an active area up to 3:0 Â 2:5 mm 2 . It produces a sound-pressure-level up to 101 dB at 400 Hz in a standard 2 ccm measurement volume. We show our measurement setup as well as a mechanic-acoustic-coupled lumped element model to calculate sound pressure. The model incorporates finite element results for mechanical behavior. Measurement results validate our model assumptions.
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