Sound Generation Using a Magnetostrictive Microactuator

Albach, Thorsten S.; Horn, P.; Sutor, Alexander; Lerch, Reinhard

doi:10.1063/1.3554200

Cited by 13 publications

(12 citation statements)

References 12 publications

(19 reference statements)

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“…No values for the THD were reported. Albach et al 3 published the concept of a MEMS-based micro speaker driven by a changing magnetic field. The concept describes a parallel arrangement of bending actuators, using a magnetostrictive active layer with a photoresist passive layer.…”

Section: Introductionmentioning

confidence: 99%

Concept and proof for an all-silicon MEMS micro speaker utilizing air chambers

et al. 2019

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MEMS-based micro speakers are attractive candidates as sound transducers for smart devices, particularly wearables and hearables. For such devices, high sound pressure levels, low harmonic distortion and low power consumption are required for industrial, consumer and medical applications. The ability to integrate with microelectronic circuitry, as well as scalable batch production to enable low unit costs, are the key factors benchmarking a technology. The Nanoscopic Electrostatic Drive based, novel micro speaker concept presented in this work essentially comprises in-plane, electrostatic bending actuators, and uses the chip volume rather than the its surface for sound generation. We describe the principle, design, fabrication, and first characterization results. Various design options and governing equations are given and discussed. In a standard acoustical test setup (ear simulator), a MEMS micro speaker generated a sound pressure level of 69 dB at 500 Hz with a total harmonic distortion of 4.4%, thus proving the concept. Further potential on sound pressure as well as linearity improvement is outlined. We expect that the described methods can be used to enhance and design other MEMS devices and foster modeling and simulation approaches.

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Section: Introductionmentioning

confidence: 99%

Concept and proof for an all-silicon MEMS micro speaker utilizing air chambers

et al. 2019

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“…All measurements have been cunducted in an anechoic measurement room. For further details on the measurements see [16]. Maximum SPL has been measured as 101 dB at 400 Hz with the 1500 µm-device.…”

Section: Resultsmentioning

confidence: 99%

“…If we do not shift the working point away from zero, frequency doubling occurs due to the nearly quadratic nature of the magnetostrictive effect. Both magnetic fields are currently generated by a turning magnet wheel and a field coil respectively [16]. In a next step, these field generators will be miniaturized to be included into a single microloudspeaker chip [10].…”

Section: Micro-loudspeakermentioning

confidence: 99%

“…Sound pressure is measured inside a 2 ccm standard measurement volume which is connected to the micro-actuator via a small rubber tube. The tube is pressed on top of the micro-actuator and has a diameter of 5 mm over a length of 1.5 mm and then changes its diameter to 1 mm over a length of 5 mm before entering the measurement volume [16].…”

Section: Micro-loudspeakermentioning

confidence: 99%

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C6.4 - Towards a Magnetostrictive Mirco-Loudspeaker

Albach¹,

Horn²,

Ilg³

et al. 2011

Proceedings SENSOR 2011

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“…Among them, electromagnetic, 1-3 piezoelectric, 4 electrostatic, 5 and magnetostrictive 6 are the most common. Though the piezoelectric and electrostatic ones are deployed more often than magnetostrictive and electromagnetic actuation because of the ease of microfabrication.…”

Section: High Fidelity Microelectromechanical System Electrodynamic Mmentioning

confidence: 99%

High fidelity microelectromechanical system electrodynamic micro-speaker characterization

Sturtzer

Shahosseini²,

Pillonnet

et al. 2013

Journal of Applied Physics

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Articles you may be interested inNovel magnets configuration toward a high performance electrodynamic micro-electro-mechanical-systems microspeaker This paper deals with the heterogeneous characterization of a microelectromechanical system (MEMS) electrodynamic micro-speaker. This MEMS micro-speaker consists of an optimized silicon structure based on a very light but very stiff membrane. The mobile part is suspended using soft suspension beams, also made of silicon, which enable large out-of-plane displacement. The electromagnetic motor is composed of a micro-assembly permanent ring magnet and of a deposit mobile planar coil fixed on the top of the silicon membrane. Previous publications have presented the MEMS as theoretically able to produce high fidelity and high efficiency over a wide bandwidth. The present study intends to validate the electrical, the mechanical, and the acoustic performance improvements. The characterization of the microfabricated micro-speaker showed that the electric impedance is flat over the entire audio bandwidth. Some results validates the performance improvements in terms of audio quality as compared to state of the art of the MEMS microspeakers, such as the high out-of-plane membrane displacement over 6400 lm, the 80 dB SPL sound pressure level at 10 cm, the 2% maximal distortion level, and the useful bandwidth from 335 Hz to cutoff frequency. V C 2013 AIP Publishing LLC. [http://dx.doi.org/10.1063/1.4808334] Sturtzer et al.

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Sound Generation Using a Magnetostrictive Microactuator

Cited by 13 publications

References 12 publications

Concept and proof for an all-silicon MEMS micro speaker utilizing air chambers

Concept and proof for an all-silicon MEMS micro speaker utilizing air chambers

C6.4 - Towards a Magnetostrictive Mirco-Loudspeaker

High fidelity microelectromechanical system electrodynamic micro-speaker characterization

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