As silicon-based transistors in integrated circuits grow smaller, the concentration of charge carriers generated by the introduction of impurity dopant atoms must steadily increase. Current technology, however, is rapidly approaching the limit at which introducing additional dopant atoms ceases to generate additional charge carriers because the dopants form electrically inactive clusters. Using annular dark-field scanning transmission electron microscopy, we report the direct, atomic-resolution observation of individual antimony (Sb) dopant atoms in crystalline Si, and identify the Sb clusters responsible for the saturation of charge carriers. The size, structure, and distribution of these clusters are determined with a Sb-atom detection efficiency of almost 100%. Although single heavy atoms on surfaces or supporting films have been visualized previously, our technique permits the imaging of individual dopants and clusters as they exist within actual devices.
Near-edge and extended x-ray-absorption fine-structure measurements from a wide variety of oxidized Si nanocrystals and H-passivated porous Si samples, combined with electron microscopy, ir absorption, forward recoil scattering, and luminescence emission data, provide a consistent structural picture of the species responsible for the luminescence observed in these systems. For porous Si samples whose luminescence wavelengths peak in the visible region, i.e. , at (700 nm, their mass-weighted-average structures are determined here to be particles (not wires) whose short-range character is crystalline and 0 whose dimensionstypically (15 Aare significantly smaller than previously reported or proposed.Results are also presented which demonstrate that the observed visible luminescence is not related to either a photo-oxidized Si species in porous Si or an interfacial suboxide species in the Si nanocrystals. The structural and compositional findings reported here depend only on sample luminescence behavior, not on how the luminescent particles are produced, and thus have general implications in assigning quantum confinement as the mechanism responsible for the visible luminescence observed in both nanocrystalline and porous silicon.
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