Small angle x-ray scattering metrology for sidewall angle and cross section of nanometer scale line gratingsThe absolute x-ray scattering cross section for water has been determined at small angles for specimen thicknesses in the range o.ss,..,t 56.2 at 20'C and in the temperature range 6 to 7S'C for ,..,t = 1.0. The data determined as a function of specimen thickness are in agreement with a new determination of second order multiple scattering. After correction for multiple scattering, the temperature dependent results are in good agreement with the zero-angle scattering cross section computed from fluctuation theory. This result precludes certain cluster models of the structure of liquid water.
scite is a Brooklyn-based organization that helps researchers better discover and understand research articles through Smart Citations–citations that display the context of the citation and describe whether the article provides supporting or contrasting evidence. scite is used by students and researchers from around the world and is funded in part by the National Science Foundation and the National Institute on Drug Abuse of the National Institutes of Health.