Passive Tire Monitoring System (PTMS) enables to detect pressure, temperature and ID number of each tire.And it also can warn drivers about low pressure or flat tires. In our proposal, the sensors to detect tire pressure are implanted in each tire. Therefore, they must have a robust structure enough to withstand against an overload pressure that is applied during curing process of tires, as well as a high sensitivity and its good linearity in their operating range. Touch Mode Capacitive Pressure Sensor (1) seems to be suitable for this system, because it has some advantages such as near linear output, strong endurance against overload pressure and a robust structure compared with other conventional pressure sensors. The purpose of this study is to improve the minimum burst pressure of the Touch Mode Capacitive Pressure Sensors in the high volume production. As a result of observation with AFM and TEM, we found that some etch-pits, which are produced in etching process of the diaphragm of the sensors, make the diaphragm weak. Consequently, we could optimize the etching conditions, and obtain the sensors of which the minimum burst pressure is 3.5MPa and more at a high yield rate.
キーワード:タッチモード容量型圧力センサ,タイヤ圧モニタリングシステム,破壊耐圧, エッチピット
The critical behaviour of an anisotropic n-vector model with purely Ising-like coupling is studied on the FCC lattice by means of high-temperature series. The model includes the s = i (n = 1) and s = m (n = 3) Ising models as special cases and exhibits rigorously mean-field behaviour at n = CO. The crossover region, l / n --f 0, t = (1t./cC) + 0, is examined in detail. The susceptibility exponent y remains Ising-like for all finite n. The critical temperature and critical susceptibility amplitude vary as lin.
Mechanical poling was applied to a BaTiO3 single crystal grown by the top-seeded solution growth (TSSG) method to remove its 90° domain walls, and then four-step electrical poling was applied to rearrange the 180° domain configuration. In each of these steps, the dielectric constant (from 50 kHz to 10 MHz) was measured by using an impedance analyzer, and the 180° domains were observed by the etching method. The dielectric spectra were confirmed to vary with rearrangement in 180° domain configuration. Dielectric constant εc in the 〈001〉 direction was 130 at 100 kHz and 58 at 10 MHz. Dielectric constant εa in the 〈100〉 direction was 4700 at 100 kHz and 1900 at 10 MHz.
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