Recently, several applications have required radio frequency filters with a narrow bandwidth and high attenuations. A ZnO film/quartz structure has a good potential to such a requirement. In this paper, we show the optimization of the ZnO/quartz structure to obtain a nearly zero temperature coefficient of frequency (TCF) while maximizing the electro-mechanical coupling coefficient (k 2 ). In the previous papers published by one of the authors about the ZnO/quartz structure, a nearly zero TCF with a small electro-mechanical coupling coefficient, or non-zero TCF with maximized k 2 was reported. However, both zero TCF and maximized k 2 have not yet been simultaneously obtained. In this study, we investigated the optimized structure by calculation and also confirmed it by measurement. #
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