In this paper, room‐temperature continuous‐wave operation of a GaN‐based vertical‐cavity surface‐emitting laser (VCSEL) with a convex structure for optical guiding is demonstrated. The GaN‐based VCSEL is designed and fabricated with the convex structure containing a 15‐nm step between the center area and the peripheral area of the VCSEL with a Nb2O5 spacer layer. In theory the convex structure with a 1.5% relative refractive index difference between the areas could provide more than 10 high‐order modes. Experimental emission spectra and near field pattern images clearly suggested a multi‐mode operation of the VCSEL with the convex structure. In addition, the VCSEL shows a lower threshold current, 2 mA, and a higher maximum light output power, 0.88 mW, which are superior to those of our standard VCSEL fabricated simultaneously without the convex structure. These results indicate that the optical guiding with the convex structure plays an important role in developments of GaN‐based VCSELs.
In organometallic vapor phase epitaxial growth of group III nitrides on sapphire, insertion of a low temperature interlayer is found to improve crystalline quality of AlxGa1−xN layer with x from 0 to 1. Here the effects of the low temperature deposited GaN or AlN interlayers on the structural quality of group III nitrides is discussed.
In organometallic vapor phase epitaxial growth of AlGaN on sapphire, the role of the low-temperature-deposited interlayers on a high-temperature-grown GaN layer was investigated by in-situ stress measurement, X-ray diffraction, and transmission electron microscopy. Crack-free and lowdislocation-density AlGaN with the whole compositional range has been realized on the sapphire substrate.
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