Abstract-We demonstrate a novel photoplastic nanoelectromechanical device that includes an encapsulated polysilicon piezoresistor. The temperature limitation that typically prevents deposition of polysilicon films on polymers was overcome by employing a hotwire CVD process. In this paper, we report the use of this process to fabricate and characterize a novel polymeric cantilever with an embedded piezoresistor. This device exploits the low Young's modulus of organic polymers and the high gauge factor of polysilicon. The fabricated device fits into the cantilever holder of an atomic force microscope (AFM) and can be used in conjunction with the AFM's liquid cell for detecting the adsorption of biochemicals. It enables differential measurement while preventing biochemicals from interfering with measurements using the piezoresistor. The mechanical and electromechanical characterization of the device is also reported in this paper.
[2008-0108]Index Terms-Affinity cantilevers, bio-microelectromechanical system (bio-MEMS), hotwire CVD (HWCVD), piezoresistive sensing, polymeric cantilevers, surface stress.
In this study, the authors demonstrate the fabrication, calibration, and testing of a piezoresistive microcantileverbased sensor for biomedical microelectromechanical system (BioMEMS) application. To use any sensor in BioMEMS application requires surface modification to capture the targeted biomolecules. The surface alteration comprises self-assembled monolayer (SAM) formation on gold (Au)/chromium (Cr) thin films. So, the Au/Cr coating is essential for most of the BioMEMS applications. The fabricated sensor uses the piezoresistive technique to capture the targeted biomolecules with the SAM/Au/Cr layer on top of the silicon dioxide layer. The stiffness (k) of the cantilever-based biosensor is a crucial design parameter for the low-pressure range and also influence the sensitivity of the microelectromechanical system-based sensor. Based on the calibration data, the average stiffness of the fabricated microcantilever with and without Au/Cr thin film is 141.39 and 70.53 mN/m, respectively, which is well below the maximum preferred range of stiffness for BioMEMS applications. The fabricated sensor is ultra-sensitive and selective towards Hg 2+ ions in the presence of other heavy metal ions (HMIs) and good enough to achieve a lower limit of detection 0.75 ng/ml (3.73 pM/ml).
Purpose
This paper aims to propose a new microfluidic portable experimental platform for quick detection of heavy metal ions (HMIs) in picomolar range. The experimental setup uses a microfabricated piezoresistive sensor (MPS) array of eight cantilevers with ion-selective self-assembled monolayer's (SAM).
Design/methodology/approach
Most of the components used in this experimental setup are battery operated and, hence, portable to perform the on-field experiments. HMIs (antigen) and thiol-based SAM (antibody) interaction start bending the microcantilever. This results in a change of resistance, which is directly proportional to the surface stress produced due to the mass of targeted HMIs. The authors have used Cysteamine and 4-Mercaptobenzoic acid as a thiol for creating SAM to test the sensitivity and identify the suitable thiol. Some of the cantilevers are blocked using acetyl chloride to use as a reference for error detection.
Findings
The portable experimental platform achieves very small detection time of 10-25 min with a lower limit of detection (LOD) 0.762 ng (6.05 pM) for SAM of Cysteamine and 4-Mercaptobenzoic acid to detect Mn2+ ions. This technique has excellent potential and capability to selectively detect Hg2+ ions as low as 2.43 pM/mL using SAM of Homocysteine (Hcys)-Pyridinedicarboxylic acid (PDCA).
Research limitations/implications
As microcantilever is very thin and fragile, it is challenging to apply a surface coating to have selective detection using Nanadispenser. Some of the cantilevers get broken during this process.
Originality/value
The excessive use and commercialization of NPs are quickly expanding their toxic impact on health and the environment. Also, LOD is limited to nanomolar range. The proposed method used the combination of thin-film, NPs, and MEMS-based technology to overcome the limitation of NPs-based technique and have picomolar range of HMIs detection.
Methods of bio-functionalize silicon nitride involve process steps to convert it into an oxynitride via plasma implantation techniques. Such methods can potentially damage microstructures such as cantilevers. In this paper, we report successful bio-functionalization of Hotwire CVD silicon nitride-based piezo-resistive cantilevers without any oxygen plasma treatment. Process to fabricate such structures and to bio-functionalize them is discussed in detail.
Purpose
This paper aims to report an insightful portable microfluidic system for rapid and selective sensing of Hg2+ in the picomolar (pM) concentration using microcantilever-based piezoresistive sensor. The detection time for various laboratory-based techniques is generally 12–24 h. The majority of modules used in the proposed platform are battery oriented; therefore, they are portable and handy to carry-out on-field investigations.
Design/methodology/approach
In this study, the authors have incorporated the benefit of three technologies, i.e. thin-film, nanoparticles (NPs) and micro-electro-mechanical systems, to selectively capture the Hg2+ at the pM concentration. The morphology and topography of the proposed sensor are characterized using field emission scanning electron microscopy and verification of the experimental results using energy dispersive X-ray.
Findings
The proposed portable microfluidic system is able to perform the detection in 5 min with a limit of detection (LOD) of 0.163 ng (0.81 pM/mL) for Hg2+, which perfectly describes its excellent performance over other reported techniques.
Research limitations/implications
A microcantilever-based technology is perfect for on-site detection, and a LOD of 0.163 ng (0.81 pM/mL) is outstanding compared to other techniques, but the fabrication of microcantilever sensor is complex.
Originality/value
Many researchers used NPs for heavy metal ions sensing, but the excess usage and industrialization of NPs are rapidly expanding harmful consequences on the human life and nature. Also, the LOD of the NPs-based method is limited to nanomolar concentration. The suggested microfluidic system used the benefit of thin-film and microcantilever devices to provide advancement over the NPs-based approach and it has a selective sensing in pM concentration.
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