Self-assembled 3D island formation during epitaxial growth was
investigated using kinetic Monte Carlo models. Schwoebel
barriers for the explanation of 3D kinetic growth were suggested.
The diffusion hop probability ratio χ for atom hops up to atom
hops down, leading to 2D, 3D and Stranski-Krastanov growth
modes, was obtained. The necessity of atomic flux from the island edge
to the upper layers for 3D island formation was demonstrated.
Island size equalization during the growth process was observed for
certain χ values. The reason for the equalization of separate
3D island lateral sizes is the increase in atomic flux to the
upper layer. The new layer nucleus on the top of the island
becomes the trap for atoms detached from the edges of the lower
layer.
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