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Origin of stress in radio frequency magnetron sputtered zinc oxide thin films J. Appl. Phys. 109, 064905 (2011); 10.1063/1.3552928Aluminum-nitride codoped zinc oxide films prepared using a radio-frequency magnetron cosputtering system Cr 2+ : ZnSe films were grown at room temperature by the radio frequency magnetron cosputtering technique. The structural characterization of the films shows that the corresponding films are well crystallized mainly in the cubic zinc-blende structure with strong ͗111͘ orientations. Using direct ͑1850 nm͒ and indirect ͑visible͒ excitations, photoluminescence experiments in the midinfrared spectral region reveal that Cr is incorporated in the optically active Cr 2+ state, and the shape of the spectra agrees with that reported for bulk materials. This study shows that magnetron cosputtering can provide viable structures for the realization of optically and electrically pumped midinfrared microlasers.

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