Kvantovaya Elektron. (Moscow) 12, 901-944 (May 1985)Optical, fiber-optic, and integrated optical sensors of physical effects are reviewed. The sensors are classified in accordance with their operating principle: amplitude, interference, and polarization sensors are considered. Descriptions are given of the construction of the sensors (or of their sensitive elements) which can react to mechanical quantities (displacement, force, acceleration), acoustic vibrations and pressure, electric and magnetic fields, electric current, temperature, angular velocity, etc. Some of their principal characteristics are described. Important parameters of known sensors are presented in a classified reference table.

The design of a variable reflectivity mirror (VRM) is reported, according to the requirements imposed on the output coupler of an U-type resonator for an industrial, cw, transverse flow CO, laser.?be reported method consists 01 building a variable thickness layer of BaF, on GaAs substrate material using RF magnetron sputtering coating. The obtained VRM final structure is AIR (ZnS)/GaAs/(BaF,, ZnSe) AIR exhibiting a maximum reflectivity of the central zone. at 10.6 pm, between 669; and 69%.The component worked, mounted on the laser resonator, for more than Mx) h allowing a single mode beam structure at power levels between 800 W and I kW cw.

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MOTS C L~S :X-ray microscopy Microscopie X Electron beam lithography Lithographie 6lectronique SUMMARY : We repon the manufacture of germanium phase zone plates as objective lenses for high resolution X-ray imaging at 2.4nm wavelength. The phase shifting properties of the germanium can be used to enhancc the diffraction efficiency of a zone plate. Zone plate pattems with smcture widths down to 30 nm are generated by low distortion electron beam lithography. The S~C~U T~S are transferred into a 280nm thick layer of germanium by reactive ion etching (RIE) using a highly selective vilevel mask. 100 nm thick baron doped silicon windows made fmm si& crys!n_! ~yafprs serve as high transmission support membranes. Measurements at the BESSY storage ring proved diffraction efficiencies up to 6.2 %. X-ray imaging of a test object showed clearly resolved 30 nm features.