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The addition of carbide forming filler particles like titanium and titanium compounds is a suitable way to adjust the thermal decomposition behaviour and the phase development of polysiloxane precursors. The carbon content in the SiCO ceramic can be influenced by the volume fraction of the active filler Ti or TiH 2 due to the methane forming carburization reactions. For high active filler volume fractions, no free carbon is found in the samples after the polymer to ceramic transformation.Besides TiC as the main crystalline phase formed at temperatures up to 1100 C titanium silicides are found whereas no oxygen containing crystalline phases are detected. From the results of the thermal simultaneous analysis it can be deduced, that the reaction between the filler particles and the polysiloxane matrix starts at temperatures of about 300 C which strongly influences the heat treatment schedule during pyrolysis.