Metal-doped ZnO films with various metal contents ( Al , Ag and Li of 0–10 wt.%) were prepared by RF magnetron sputtering system with specially designed ZnO targets. The structural, optical and electrical properties of MZO films depended on the type and content of doping in target. Electrical resistivity of LZO thin films increased with increasing Li doping amounts between 0 and 4 wt.%, suggesting that an epitaxial LZO film has high resistivity. We observed morphology in pure ZnO films by using different etchant. In addition, etching rate were contrasted with the etchant concentration and pH. The etching rate is proportional exponentially to pH value. These data will be the technical basis for TCO application. Also, the dry etching rate decreased with increasing the Cl 2 concentration in CH 4/ H 2/ Ar + additive Cl 2 gas mixture but metal dopants were etched effectively.
ZnO nanoparticles were synthesized by spray pyrolysis method using the zinc acetate d hydrate as starting material at various synthesis temperatures. The structures of the synthesized ZnO were characterized by X-ray diffraction (XRD), scanning electron microscopy (SEM), and Fourier transformation infrared (FT-IR), and UV-vis spectroscopy. With increasing synthesis temperature, the mean diameter of ZnO nanoparticles increased, and their crystallinity was improved.The photocatalytic activity of ZnO was studied by the photocatalytic degradation of methyleneblue (MB) under UV irradiation (365nm) at room temperature. The results show that the photocatalytic efficiency of ZnO nanoparticles was enhanced by increasing synthesis temperature.
Spherical-shape Zn 2 SiO 4: Mn phosphor particles with the mean particle size from submicron to micron sizes were prepared by ultrasonic spray pyrolysis method. A droplet separator was introduced to control the size distribution of the phosphor particles with spherical shape. The Zn 2 SiO 4: Mn phosphor particles with 2 mol% doping concentration of manganese have decay time and have photoluminescence intensities comparable with those of the latest commercial product prepared by the solid state reaction method. The size of the phosphor particles was decreased from 1000 to 200 nm as the inorganic salt solution concentration was changed from 0 to 5 M. The phosphor particles prepared from the solutions above 0.5 M have photoluminescence intensities comparable with that of the latest commercial product.
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