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Transmitted Kikuchi diffraction (TKD) is an emerging SEM-based technique that enables investigation of highly refined grain structures. It offers higher spatial resolution by utilizing conventional electron backscattered diffraction equipment on electron-transparent samples. A successful attempt has been made to reveal nano-oxide grain structures as well as ultrafine severely deformed metallic grains. The effect of electron beam current was studied. Higher beam currents enhance pattern contrast and intensity. Lower detector exposure times could be employed to accelerate the acquisition time and minimize drift and carbon contamination. However, higher beam currents increase the electron interaction volume and compromise the spatial resolution. Lastly, TKD results were compared to orientation mapping results in TEM (ASTAR). Results indicate that a combination of TKD and EDS is a capable tool to characterize nano-oxide grains such as Al2O3 and Cr2O3 with similar crystal structures.

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