Position controlling with less overshoot and control effort is a fundamental issue in the design and application of micro-actuators such as micro-positioner. Also, tracking a considered path is very crucial for some particular applications of micro-actuators such as surgeon robots. Herein, a proportional–integral–derivative controller is designed using a feedback linearization technique for path tracking control of a cantilever electromechanical micro-positioner. The micro-positioner is simulated based on a 1-degree-of-freedom lumped-parameter model. Three different paths are considered, and the capability of the designed controller on the path tracking with lower error and control effort is investigated. The obtained results demonstrate the efficiency of the designed proportional–integral–derivative controller not only for reducing the tracking error but also for decreasing the control effort.
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