Replica molding-based triboelectrification has emerged as a new and facile technique to generate nanopatterned tribocharge on elastomer surfaces. The “mechano-triboelectric charging model” has been developed to explain the mechanism of the charge formation and patterning process. However, this model has not been validated to cover the full variety of nanotexture shapes. Moreover, the experimental estimation of the tribocharge’s surface density is still challenging due to the thick and insulating nature of the elastomeric substrate. In this work, we perform experiments in combination with numerical analysis to complete the mechano-triboelectrification charging model. By utilizing Kelvin probe force microscopy (KPFM) and finite element analysis, we reveal that the mechano-triboelectric charging model works for replica molding of both recessed and protruding nanotextures. In addition, by combining KPFM with numerical electrostatic modeling, we improve the accuracy of the surface charge density estimation and cross-calibrate the result against that of electrostatic force microscopy. Overall, the regions which underwent strong interfacial friction during the replica molding exhibited high surface potential and charge density, while those suffering from weak interfacial friction exhibited low values on both. These multi-physical approaches provide useful and important tools for comprehensive analysis of triboelectrification and generation of nanopatterned tribocharge. The results will widen our fundamental understanding of nanoscale triboelectricity and advance the nanopatterned charge generation process for future applications.
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